Microstructure-Based Interfacial Tuning Mechanism of Capacitive Pressure Sensors for Electronic Skin

Figure 2

Different profile structures of the CPS. (a) The flat panel, (b) the cuboids, (c) the cylinders, and (d) the pyramids. The 3D diagrams of the CPS, the cross-sectional view of sensors, the vertical view of the functional layer of the sensor, and the deformations of the functional layer are listed in the figure from top to bottom.

(a)

(b)

(c)

(d)