Microstructure-Based Interfacial Tuning Mechanism of Capacitive Pressure Sensors for Electronic Skin

Figure 3

The pressure responses of the CPS with different microstructures. The deformations of the CPS were shown as (a) the flat panel, (b) the cuboids, (c) the cylinders, and (d) the pyramids. In the same model, the top part is the surface deformation of the CPS, the bottom part is the partial detailed view of the microstructure. (e) The capacitance-pressure characteristics of the sensors with different microstructures. (f) The sensitivity and nonlinear error of the sensors with different microstructures.

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(b)

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