Microstructure-Based Interfacial Tuning Mechanism of Capacitive Pressure Sensors for Electronic Skin

<div>The pressure responses of the CPS with different lengths of hemline of pyramids. (a) The profile structures of sensors with different lengths of hemline of pyramid, from 8 <i>μ</i>m to 12 <i>μ</i>m, and the same height 7.0711 <i>μ</i>m, at 1 MPa. (b) The comparison of capacitance-pressure characteristics of the sensors with different lengths. (c) The sensitivity and nonlinear error of the sensors with different lengths.</div>

Journal of Sensors

fig4

Figure 4

Figure 4: Microstructure-Based Interfacial Tuning Mechanism of Capacitive Pressure Sensors for Electronic Skin 