Microstructure-Based Interfacial Tuning Mechanism of Capacitive Pressure Sensors for Electronic Skin

<div>The pressure responses of the CPS with different heights of pyramids. (a) The profile structures of sensors with different heights of pyramid, from 5 <i>μ</i>m to 9 <i>μ</i>m, and the same lengths of hemline 10 <i>μ</i>m, at 1 MPa. (b) The comparison of capacitance-pressure characteristics of the sensors with different heights. (c) The sensitivity and nonlinear error of the sensors with different heights.</div>

Journal of Sensors

fig5

Figure 5

Figure 5: Microstructure-Based Interfacial Tuning Mechanism of Capacitive Pressure Sensors for Electronic Skin 