Microstructure-Based Interfacial Tuning Mechanism of Capacitive Pressure Sensors for Electronic Skin

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left">Height <svg height="8.68572pt" id="M55" style="vertical-align:-0.0498209pt" version="1.1" viewbox="-0.0498162 -8.6359 11.0606 8.68572" width="11.0606pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M828 650H570L564 622C646 614 650 609 634 524L604 366H253L281 524C296 608 308 615 382 622L388 650H132L126 622C211 615 214 609 198 524L121 122C106 42 102 35 23 28L17 0H276L282 28C196 35 191 40 206 122L243 324H597L559 123C544 42 537 35 452 28L446 0H710L716 28C632 35 628 43 643 122L719 524C735 610 741 615 822 622L828 650Z" id="g113-73"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="840" vert-adv-y="840"></glyph.data></g></svg> (<i>μ</i>m)</td><td class="align_center">Sensitivity <svg height="8.68572pt" id="M56" style="vertical-align:-0.0498209pt" version="1.1" viewbox="-0.0498162 -8.6359 9.95144 8.68572" width="9.95144pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M743 650H503L496 622L527 618C563 613 564 603 532 573C449 495 371 431 323 392C301 374 272 355 246 346L280 522C297 609 300 614 379 622L385 650H135L129 622C209 614 215 609 198 522L124 133C106 39 99 35 23 28L17 0H271L277 28C193 35 192 39 208 133L239 316C264 328 280 325 303 288C368 183 435 90 502 0H652L659 28C602 34 584 43 543 94C495 154 403 283 347 369L574 554C634 603 659 612 735 624L743 650Z" id="g113-76"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="755" vert-adv-y="755"></glyph.data></g></svg> (fF/Pa)</td><td class="align_center">Nonlinear error <svg height="6.1673pt" id="M57" style="vertical-align:-0.2063904pt" version="1.1" viewbox="-0.0498162 -5.96091 5.60619 6.1673" width="5.60619pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M393 379C402 394 400 411 393 422C384 437 365 448 348 448C301 448 237 372 186 285H182L193 335C210 408 205 448 178 448C150 448 80 402 29 344L45 321C80 355 114 373 122 373C128 373 130 365 124 330C106 228 76 98 50 -5L57 -12C82 -5 112 3 132 6L172 203C196 256 234 304 254 329C275 355 293 367 306 367C318 367 330 360 342 348C347 343 355 343 365 350S386 367 393 379Z" id="g113-115"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="422" vert-adv-y="422"></glyph.data></g></svg></td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">5</td><td class="align_center">3.98334<i>E</i> − 7</td><td class="align_center">0.005111%</td></tr><tr><td class="align_left">6</td><td class="align_center">4.04683<i>E</i> − 7</td><td class="align_center">0.005135%</td></tr><tr><td class="align_left">7</td><td class="align_center">4.09844<i>E</i> − 7</td><td class="align_center">0.005384%</td></tr><tr><td class="align_left">8</td><td class="align_center">4.12467<i>E</i> − 7</td><td class="align_center">0.006055%</td></tr><tr><td class="align_left">9</td><td class="align_center">7.00589<i>E</i> − 7</td><td class="align_center">0.022813%</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Sensitivity and nonlinear error of the CPS with different heights of pyramids.

Journal of Sensors

tab3

Table 3

Table 3: Microstructure-Based Interfacial Tuning Mechanism of Capacitive Pressure Sensors for Electronic Skin 