EGFET pH Sensor Performance Dependence on Sputtered TiO₂ Sensing Membrane Deposition Temperature

Figure 7

Hysteresis characteristics for pH loop of 7 4 7 10 7 and 7 10 7 4 7 of TiO₂ thin films deposited at (a) room temperature and (b) 200°C. The hysteresis widths are shown in (c) and (d) for TiO₂ thin films deposited at room temperature and 200°C, respectively.

(a)  

(b)

(c)

(d)