Principle Research on a Novel Piezoelectric 12-DOF Force/Acceleration Sensor

Table 3

Crossing coupling simulation results of static sensitivity in 6-axis acceleration directions under an external force.

Load category	Crossing coupling
	Ax	Ay	Az	αx	αy	αz
Fx	0.0111%	0.0002%	−0.0001%	0.0009%	−0.0030%	0
Fy	−0.0004%	0.0110%	−0.0001%	0.0032%	0.0006%	0
Fz	0	−0.0001%	−0.0013%	0.0001%	−0.0001%	−0.0008%
Mx	0.0002%	−0.0106%	0	−0.0016%	−0.0006%	0
My	0.0107%	0	0	0.0008%	−0.0014%	0
Mz	0	0	0	0	0	−0.0001%