Highly Sensitive Reentrant Cavity-Microstrip Patch Antenna Integrated Wireless Passive Pressure Sensor for High Temperature Applications

Figure 3

Mechanical structure of the reentrant cavity sensor. (a) Cross-section view of the assembled sensor. (b) Top view of the sensor cap. (c) Bottom view of the cap. (d) Cross-section view of the cap. (e) Cross-section view of the substrate.

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