Digital Closed-Loop Driving Technique Using the PFD-Based CORDIC Algorithm for a Biaxial Resonant Microaccelerometer

Figure 13

Amplitude-frequency characteristics for the four resonators labeled R1, R2, R3, and R4 in Figure 1 with different acceleration inputs: (a) the first resonator is labeled R1, (b) the second resonator is labeled R2, (c) the third resonator is labeled R3, and (d) the fourth resonator is labeled R4.

(a)

(b)

(c)

(d)