Structure-Dependent CO₂ Gas Sensitivity of La₂O₂CO₃ Thin Films

Figure 1

The scheme (“aerial view”) of the microelectrode substrate. Its lateral dimensions are  mm². The letters ((a), (b), (c), and (d)) and corresponding halftones are indicating the exposed materials: (a) passivated substrate (Si + 200 nm); (b) electrodes (Ti 10 nm + Pt 250 nm) on (a); (c) 1800 nm on (b); (d) 1800 nm on (a). The slit used for sensor measurements is marked with an arrow and the contact pads for this slit are marked with crosses.