Shear-Force Sensors on Flexible Substrates Using Inkjet Printing

Table 1

Comparison of the theoretical and measured capacitance values and their change , the thickness of the dielectric spacer _, and the deflection . Bold values are calculated from the other columns.

	(pF)	(fF)	Overlap		(μm)	(nm)
Ideal 50%	12.3	45	50%	2.5	40.0	146
Ideal 67%	16.5	45	67%	2.5	40.0	109
Sensor	6.82	45	67%	2.5	96.8	635
(25% air)	6.82	45	67%	1.8	69.7	457