Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

<figure class="figure-group responsive"><div class="sub-figure" id="a"><object data="https://static-preview.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.002a.svgz" name="5408268.fig.002a" type="image/svg+xml"></object><div class="fig-label">(a) Stress distribution</div></div><div class="sub-figure" id="b"><object data="https://static-preview.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.002b.svgz" name="5408268.fig.002b" type="image/svg+xml"></object><div class="fig-label">(b) Deflection distribution</div></div></figure>

<p>The simulation results of the stress and deflection of the diaphragm under 100 kPa.</p>

Journal of Sensors

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Figure 2

Figure 2: Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology 