The Chemresistive Properties of SiC Nanocrystalline Films with Different Conductivity Type

Figure 3

Gas sensing results of n-nc-SiC films towards a) oxygen concentration of 21%, 10%, 3%, b) carbon monoxide concentration of 0.1%, 0.04%, c) methane concentration of 10%, 5%. Testing temperature – 500°C. The numbers on the insert indicate the gas concentration.

(a)

(b)

(c)