The Chemresistive Properties of SiC Nanocrystalline Films with Different Conductivity Type

Figure 4

Gas sensing results of p-nc-SiC films towards a) oxygen concentration of 20%, 10%, 3%, b) carbon monoxide concentration of 0.1%, 0.04%, c) methane concentration of 10%, 5%. Testing temperature 500°C. The numbers on the insert indicate the gas concentration.

(a)

(b)

(c)