Level Detection Equipment for Measuring the Influence of Different Leveling Accuracies on Linear Error

Table 1

The comparison of the accuracy of different sensors.

Sensor type	Sensitivity	Repeatability	Measuring range	Axial
Inductor (Wyler)	2 arcsec	3.6 arcsec	±30 arcsec	Uniaxial
Capacitance (D. Benz)	0.02^°	0.04^°	180^°	Uniaxial
Electrolyte (Fredericks)	1 arcsec	5 arcsec	3^°	Uniaxial
Photoelectric (W.Y. Jywe)	0.05 um	0.1 um	1800 arcsec	Uniaxial
In this research and development equipment	0.36 arcsec	3.6 arcsec	3^°	Biaxial