Research Article
Level Detection Equipment for Measuring the Influence of Different Leveling Accuracies on Linear Error
(a) Validation experiment level parameter list |
| | Parameter group | axis(mm/m) | axis(mm/m) |
| | 0.02 | 0.02 | | -0.01 | 0.05 | | 0.05 | -0.005 |
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(b) Validation experiment comparison table |
| | Parameter group | Kinematic error pattern | Actual value | Prediction value | Error value |
| | EXX | 0.0205 | 0.0203 | 1% | | EAX | 0.0198 | 0.0202 | 2% | | EYY | 0.0202 | 0.0199 | 1.5% | | EBY | 0.0195 | 0.0198 | 1.5% |
| | EXX | -0.0104 | -0.0096 | 8.3% | | EAX | 0.0495 | 0.0503 | 1.6% | | EYY | 0.0487 | 0.05 | 2.6% | | EBY | -0.0105 | -0.0104 | 1% |
| | EXX | 0.0505 | 0.0503 | 0.4% | | EAX | -0.0055 | -0.0049 | 10.9% | | EYY | -0.0047 | -0.0052 | 9.6% | | EBY | 0.0509 | 0.0499 | 2% |
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