Composition Regulation and Microstructure Characterization of Fe_100-xGa_x Films in the Manufacturing Industry

Table 1

EDS results of as-deposited Fe_100-xGa_x films.

Specimen no.	a	b	c	d	e	f
, area ratio of iron slices to alloy targets	0	0.014	0.028	0.042	0.056	0.070
Fe content in films, at.100%	83.25	83.61	84.35	84.58	84.95	85.48
Ga content in films, at.100%	16.75	16.39	15.65	15.42	15.05	14.52