A Wireless Passive Vibration Sensor Based on High-Temperature Ceramic for Harsh Environment

Table 1

Geometric dimensions of the as-designed accelerometer.

Parameter	Symbol	Value
	Inner diameter	11 mm
	Outer diameter	49 mm
	Side length of plate	8 mm
	Initial spacing	1.4 mm
	Length of beam	10 mm
	Width of beam	3 mm
	Thickness of beam	100 μm
	Side of mass	13 mm
	Thickness of mass	200 μm