Application of Adaptive PID Temperature Control Algorithm under Spatial Thermal Model of ALD Reaction Chamber

Table 1

Basic parameters of the upper computer.

Components	Parameters
CPU	Morethanthe3G
Main memory	Morethanthe2G
Hard disk	Morethanthe100G
Graphics card	2GDiscretegraphicscard
System	WindowsXPSP3
Program	Intouch9.6
Server	OPCLink8.0