Application of Adaptive PID Temperature Control Algorithm under Spatial Thermal Model of ALD Reaction Chamber

Table 2

Temperature measurement conditions of the ALD reaction chamber.

Number	Heater	Pumpline	Purge1	Purge2	Hottrap
1	50	150	100	100	400
2	70	150	100	100	400
3	100	150	100	100	400
4	150	150	100	100	400
5	200	150	100	100	400
6	250	150	100	100	400
7	300	150	100	100	400
8	350	150	100	100	400
9	400	150	100	100	400
10	450	150	100	100	400
11	500	150	100	100	400
12	550	150	100	100	400