Application of Adaptive PID Temperature Control Algorithm under Spatial Thermal Model of ALD Reaction Chamber

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left">Temperature control algorithm</td><td class="align_center">Advantages</td><td class="align_center">Shortcomings</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">PID</td><td class="align_center">Easy to debug, high control precision, strong anti-interference ability, high stability ability</td><td class="align_center">Coordination is not good enough</td></tr><tr><td class="align_left">Fuzzy control</td><td class="align_center">Strong robustness and fast response</td><td class="align_center">The parameters are complex and expensive</td></tr><tr><td class="align_left">Neural network control</td><td class="align_center">The algorithm is simple and easy to implement in hardware and software</td><td class="align_center">The system is complex and requires more human coordination</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Advantages of the PID temperature control algorithm.</div>

Journal of Sensors

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Table 3

Table 3: Application of Adaptive PID Temperature Control Algorithm under Spatial Thermal Model of ALD Reaction Chamber 