Research Article
Parametric Analysis of Electrostatic Comb Drive for Resonant Sensors Operating under Atmospheric Pressure
Figure 8
Simulation results of fluid–solid coupling calculation model: (a) the stress distribution on the surface of comb finger; (b) the x component of fluid load distribution on the surface of comb finger. Note. At this time, the x component of the comb finger speed is 3.5468 × 10−4 m/s.
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| (b) |