Parametric Analysis of Electrostatic Comb Drive for Resonant Sensors Operating under Atmospheric Pressure

Table 1

Typical dimension parameter values of comb drive structure.

Symbol	Parameter	Typical value
L	Comb finger length	15 μm
w	Comb finger width	3 μm
d	Comb finger gap	3 μm
h	Film thickness	30 μm
	Comb finger spacing	11 μm
	Comb finger overlapping length	4 μm
s	Main drive arm width	18 μm
D	Back spacing of comb finger	29 μm
H	Cavity depth	400 μm
n	Unilateral comb finger number	720