Parametric Analysis of Electrostatic Comb Drive for Resonant Sensors Operating under Atmospheric Pressure

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left">Objective function</td><td class="align_center" colspan="2">Optimization variables (<span class="nowrap"><svg height="6.50656pt" id="M90" style="vertical-align:-0.2846799pt" version="1.1" viewbox="-0.0498162 -6.22188 6.96327 6.50656" width="6.96327pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M505 450L483 476C450 448 422 434 403 434C385 434 350 435 291 447C259 453 223 457 200 457C171 457 144 433 116 394C102 374 81 341 63 298L90 277C121 325 151 354 208 354C228 354 253 352 280 348C309 344 342 348 360 354C264 265 145 162 73 103C33 70 21 36 21 16C21 0 29 -9 36 -12C42 -12 46 -9 50 -3C59 12 69 25 85 36C105 50 119 54 175 26C215 6 274 -21 306 -21C358 -21 412 19 474 159L446 182C391 111 363 94 334 94C315 94 290 97 257 111C226 124 192 131 166 131C211 168 330 270 416 352C452 386 483 422 505 450Z"></path></g></svg>)</span></td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_center" rowspan="5"><span style="width: 156.244ptpx;"><svg height="29.2897pt" id="M91" style="vertical-align:-11.4936pt" version="1.1" viewbox="-0.0498162 -17.7961 156.244 29.2897" width="156.244pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M797 0V26C739 32 732 36 732 103V296C732 394 682 449 605 449C576 449 550 437 529 423C504 407 475 389 446 366C425 418 382 449 334 449C303 449 279 437 253 421C222 403 201 385 180 371V452C135 432 85 419 41 411V388C99 379 102 374 102 310V103C102 38 93 32 27 26V0H238V26C189 32 180 38 180 103V338C210 363 250 390 289 390C351 390 377 348 377 275V103C377 37 368 32 306 26V0H520V26C465 32 456 38 456 101V296C456 314 455 326 453 338C491 369 529 390 565 390C628 390 653 345 653 274V107C653 36 642 32 583 26V0H797Z"></path></g><g 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height="9.39034pt" id="M92" style="vertical-align:-3.42943pt" version="1.1" viewbox="-0.0498162 -5.96091 12.1446 9.39034" width="12.1446pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M546 430L539 434C529 434 505 438 495 440C473 444 450 448 430 448C352 448 265 412 213 366C145 306 96 203 96 103C96 22 135 -12 160 -12C190 -12 238 14 262 32C310 68 368 120 411 184H413C403 117 396 75 384 21C353 -118 325 -158 291 -184C270 -200 241 -205 208 -205C133 -205 90 -164 74 -110C70 -98 58 -100 49 -107C34 -119 23 -140 23 -155C23 -190 74 -261 166 -261C219 -261 280 -233 314 -208C383 -157 446 -79 470 81C491 223 529 388 546 430ZM456 386C452 357 433 283 420 252C402 216 366 174 325 129C288 88 239 56 212 56C192 56 182 77 182 120C182 165 199 242 226 292C256 348 281 377 311 389C327 395 353 402 375 402C408 402 436 394 456 386Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.072,3.132)"><path d="M245 635C92 635 37 457 37 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598 358 454 358 312C358 173 334 26 245 26C158 26 128 174 128 313S152 598 243 598Z"></path></g></svg></span></td></tr><tr><td class="align_center" colspan="2"><i>d</i></td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Definition of the parametric optimization for a comb-driven resonator.</div>

Journal of Sensors

tab2

Table 2

Table 2: Parametric Analysis of Electrostatic Comb Drive for Resonant Sensors Operating under Atmospheric Pressure 