Research Article
Parametric Analysis of Electrostatic Comb Drive for Resonant Sensors Operating under Atmospheric Pressure
Table 3
Dimension parameter values of initial and optimal comb drive structure.
| | Symbol | Parameter | Initial value | Optimized value |
| | w | Comb finger width | 5 μm | 3 μm | | d | Comb finger gap | 4 μm | 3 μm | | h | Film thickness | 30 μm | 30 μm | | Comb finger spacing | 12 μm | 11 μm | | Comb finger overlapping length | 3 μm | 4 μm | | A | Area of drive structure (normalized) | 1 | 1.29 |
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