Angle-Resolved Intensity of In-Axis/Off-Axis Polarized Micro-Raman Spectroscopy for Monocrystalline Silicon

Figure 1

Definitions of coordinate systems and angle parameters. The green triangle represents the direction of light propagation; the red line and purple line represent the incident laser and scattering light, respectively. Five coordinate systems are shown in this figure, the incident laser coordinate system (X′Y′Z′), the scattered light coordinate system (x′y′z′), the space coordinate system (XYZ), the sample coordinate system (xyz), and the crystal coordinate system ([100] [010] [001]), respectively.