Influences of Analog-to-Digital Conversion Accuracy and Response Uniformity of CCD on Small-Scale Laser Focal Spot Measurements

Table 1

The centroid’s coordinate of the irregular focal spot by the CCD two-dimensional scanning.

Super-Gaussian order N	Calculated spot centroid position (μm)	Centroid position true value (μm)
10	(−0.9, −1.3)	(−0.3, −0.8)
20	(−0.6, −1.1)	(−0.3, −0.8)
30	(−0.5, −1.0)	(−0.3, −0.8)
40	(−0.5, −1.0)	(−0.3, −0.8)
50	(−0.4, −0.9)	(−0.3, −0.8)
60	(−0.4, −0.9)	(−0.3, −0.8)
70	(−0.3, −0.8)	(−0.3, −0.8)