Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique

<div>Laser damage density test diagram. (a) Test area: 40 mm × 40 mm square area at the center of the surface. (b) Test route: “S”- type route, sequence of laser shots: 1–16.</div>

Laser and Particle Beams

fig3

Figure 3

Figure 3: Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique 