Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr class="thead"><td class="align_left">Parameters</td><td class="align_center">Value</td></tr><tr><td class="thead-hr" colspan="2"><hr/></td></tr><tr><td class="align_left">Flow rate</td><td class="align_center">130 L/h</td></tr><tr><td class="align_left">Electric current</td><td class="align_center">0.8 A</td></tr><tr><td class="align_left">Polishing wheel speed</td><td class="align_center">240r/min</td></tr><tr><td class="align_left">Polishing abrasive</td><td class="align_center">CeO<sub>2</sub></td></tr><tr><td class="align_left">Abrasive diameter</td><td class="align_center">0.2 <i>μ</i>m</td></tr><tr><td class="align_left">Volume removal efficiency</td><td class="align_center">3.6 × 10<sup>7</sup> <i>μ</i>m<sup>3</sup>/min</td></tr><tr><td class="align_left">Material removal depth</td><td class="align_center">1<i>μ</i>m</td></tr><tr class="table-tr"><td colspan="2"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Laser and Particle Beams

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Table 1

Table 1: Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique 