Laser and Particle Beams

Research Article

Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique

Table 2

IBSE parameters.
ParameterValue
Polishing gasAr
Angle0。
Chamber pressure1 × 10−4 Pa
Removal efficiency11.5 × 10−3 μm3/min
Beam energy900 eV