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Laser and Particle Beams
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Laser and Particle Beams
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2022
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Article
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Tab 4
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Research Article
Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique
Table 4
AMP etching depth.
Sample number
Depth (
μ
m)
2#
3
3#
3
4#
3
5#
5
6#
5
7#
5
9#
5