Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique

Table 5

Damage density test result.

Sample	Laser energy J/cm^2	Laser shot	Damage spot number	Damage density/mm^2
2#	10	16	2	0.00125
3#	10	16	4	0.0025
4#	10	16	4	0.0025
5#	10	16	2	0.00125
6#	10	16	3	0.001875
7#	10	16	10	0.00625
8#	10	16	1130	0.70625