Research Article
Study on Damage Characteristics of Fused Silica under Ion Beam Sputtering and AMP Technique
Table 5
Damage density test result.
| Sample | Laser energy J/cm2 | Laser shot | Damage spot number | Damage density/mm2 |
| 2# | 10 | 16 | 2 | 0.00125 | 3# | 10 | 16 | 4 | 0.0025 | 4# | 10 | 16 | 4 | 0.0025 | 5# | 10 | 16 | 2 | 0.00125 | 6# | 10 | 16 | 3 | 0.001875 | 7# | 10 | 16 | 10 | 0.00625 | 8# | 10 | 16 | 1130 | 0.70625 |
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