An Active Disturbance Rejection Sliding Mode Contour Tracking Control for Biaxial Moving Platform

Table 4

Experimental data of contour error.

Cross-coupling compensation control algorithm	Mean (mm)	Maximum (mm)	Accumulated error (mm)
No CCC	0.0078	0.0360	49.1699
PID	0.0060	0.0327	37.8782
Nonlinear PD	0.0054	0.0318	34.2007