A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="586718.fig.006a" src="https://static-preview.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.006a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>The real part of mirror 1</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="586718.fig.006b" src="https://static-preview.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.006b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>The imaginary part of mirror 1</td></tr></table></td></tr><tr class="fig-image" id="c"><td><img alt="586718.fig.006c" src="https://static-preview.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.006c.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(c) </b>The real part of mirror 2</td></tr></table></td></tr><tr class="fig-image" id="d"><td><img alt="586718.fig.006d" src="https://static-preview.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.006d.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(d) </b>The imaginary part of mirror 2</td></tr></table></td></tr></table>

<table>The air film pressure distribution calculated by the wavelet interpolation Galerkin method at <math id="M337" xmlns="http://www.w3.org/1998/Math/MathML"><mrow><msub><mrow><mi>p</mi></mrow><mrow><mn>0</mn></mrow></msub></mrow></math> = 1 torr.</table>

Mathematical Problems in Engineering

fig6

Figure 6

Figure 6: A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping 