Research Article

Qualitative Simulation of the Growth of Electrolessly Deposited Cu Thin Films

Figure 4

The growth of Cu particles with (a) a low reaction rate 𝐹 = 1 5 , (c) a reaction rate function 𝐹 ( 𝑧 ) in (3.2), and (e) densely populated catalytic seeds. (b), (d), and (f) The in-plane growth and out-plane growth for deposition in (a), (c), and (e), respectively.
528351.fig.004a
(a)
528351.fig.004b
(b)
528351.fig.004c
(c)
528351.fig.004d
(d)
528351.fig.004e
(e)
528351.fig.004f
(f)