An Inversely Designed Model for Calculating Pull-In Limit and Position of Electrostatic Fixed-Fixed Beam Actuators

Table 3

Comparison of IPM and IPMF with previous simulation results.  μm,  GPa, ,  μm,  μm and  μm in each case.

Residual Stress, , (MPa)	0	100	−25
CoSolve [17]	40.10	57.60	33.60
V (2D) [17] (Δ%)	39.50 (1.50%)	56.90 (1.22%)	33.70 (0.30%)
OCI Model [12] (Δ%)	39.60 (1.25%)	57.40 (0.35%)	33.71 (0.33%)
GDQM [15] (Δ%)	39.13 (2.41%)	57.62 (0.03%)	33.63 (0.09%)
IPM (Δ%)	39.13 (2.41%)	39.13 (32.07%)	39.13 (16.461%)
IPMF (Δ%)	39.42 (1.70%)	57.03 (0.99%)	33.61 (0.03%)