Development of a Flat Type Six-Axis Stage Based on Piezoelectric Actuators

Figure 2

Illustration of the six-DOF stage construction: (a) -axis stage is installed on the base platform; (b) -axis is placed on the -axis stage; (c) -tilt stage is on the -axis stage and the work platform is fixed to the top of the stack.

(a)

(b)

(c)