Dynamic Characteristics of Electrostatically Actuated Microbeams with Slant Crack

Figure 1

Schematic of a microbeam with a slant crack on the surface. (a) The mathematical modeling of an electrostatically actuated fixed-fixed microbeam with a slant crack. (b) Top view of stress components analysis of the microbeam loaded with a bending moment . (c) Optical image of an actual beam specimen with a slant crack located at the center of a MEMS fatigue device and anchored to two lateral plates acting as electrostatic actuators [35].

(a)

(b)

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