Research Article

Dynamic Characteristics of Electrostatically Actuated Microbeams with Slant Crack

Figure 3

The effects of the depth ratio (a, b) and the slant angle (c, d) of the slant crack on the first-mode shapes of the beam at different positions. (a) and (c) ; (b) and (d) .
(a)
(b)
(c)
(d)