Research Article
Dynamic Characteristics of Electrostatically Actuated Microbeams with Slant Crack
Figure 3
The effects of the depth ratio (a, b) and the slant angle (c, d) of the slant crack on the first-mode shapes of the beam at different positions. (a) and (c) ; (b) and (d) .
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(b) |
(c) |
(d) |