Dynamic Characteristics of Electrostatically Actuated Microbeams with Slant Crack

Table 1

Values of the first four frequency parameters for a fixed-fixed beam with different crack positions and crack slant angles. Crack depth ratio .

	= 0.05				= 0.5
	= 0°	= 15°	= 30°	= 45°	= 0°	= 45°	= 30°	= 45°
= 1	4.6392	4.6452	4.6616	4.6836	4.6673	4.6719	4.6840	4.6995
= 2	7.7647	7.7702	7.7855	7.8065	7.8532	7.8532	7.8532	7.8532
= 3	10.929	10.933	10.944	10.960	10.806	10.819	10.854	10.901
= 4	14.100	14.102	14.108	14.117	14.137	14.137	14.137	14.137