Dynamic Characteristics of Electrostatically Actuated Microbeams with Slant Crack

Table 2

Parameters values for the solution and results values.

Figure	Varying parameters		Resonant; frequency	Max-amplitude
Figure 7	= 0.05		21.63	0.4317
	= 0.25		22.34	0.4150
	= 0.5		22.06	0.4193
Figure 8(a)		= 0.5	22.34	0.4141
		= 0.5	22.04	0.4188
		= 0.5	21.43	0.4289
Figure 8(b)		= 0.05	22.33	0.4143
		= 0.05	21.88	0.4235
		= 0.05	21.09	0.4407
Figure 9(a)	= 0°	= 0.5	18.29	0.4399
	= 23°	= 0.5	18.53	0.4377
Figure 9(a)	= 45°	= 0.5	20.88	0.4453
	= 70°	= 0.5	21.56	0.4305
Figure 9(b)	= 0°	= 0.05	20.41	0.4561
	= 23°	= 0.05	20.53	0.4532
	= 45°	= 0.05	20.88	0.4453
	= 70°	= 0.05	21.56	0.4305
Figure 10(a)	= 1.0 V		22.06	0.07172
	= 6.0 V		22.04	0.2513
	= 6.0 V		21.99	0.4317
Figure 10(a)	V		22.04	0.04188
	V		22.04	0.2094
	V		22.04	0.4188