Mechanism and Modeling of Contaminant Accumulation on Hot-Film Air Flow Sensor

Table 1

MEMS hot-film flow sensor contaminant accumulation test scheme.

Scheme number	Test purpose	Sensor number	Scheme description	Test parameter
				Flow(L/min)	Test medium
I	Testing the effect of energization on contaminant accumulation	1	Energized	0.8	Air-micro-silica two-phase flow
		2	No energized
II	Testing the effect of chip position on contaminant accumulation	1	Chip located at the top
		3	Chip located at the bottom