Mechanism and Modeling of Contaminant Accumulation on Hot-Film Air Flow Sensor

Table 3

Flow rate measured by No.1~No.3 sensors and cumulative thickness of particles on chip surface.

Test time; (h)	Sensor flow rate(L/min)				Particle cumulative thickness(μm)
	Ref.	No.1	No.2	No.3	No.1	No.2	No.3
60	15	11.8	14.6	12.3	25.893	3.086	19.526
120	15	10.2	14.0	11.4	33.997	7.026	27.742
180	15	8.5	13.5	9.3	42.864	12.343	39.801