Mechanism and Modeling of Contaminant Accumulation on Hot-Film Air Flow Sensor

Table 4

Flow rate measured by No.4 and No.5 sensors and cumulative thickness of contaminants on chip surface.

Test time; (day)	Sensor flow rate(L/min)			Particle cumulative thickness(μm)
	Ref.	No.4	No.5	No.4	No.5
39	15	15	14.9	0	1.323
195	15	15	14.7	0	2.325