Mechanism and Modeling of Contaminant Accumulation on Hot-Film Air Flow Sensor

Table 8

Flow rate measured by No.6 and No.7 sensors.

Test time; (h)	Reference value	No.6 sensor		No.7 sensor
	(L/min)	Flow rate; (L/min)	Decrease amplitude of accuracy; (%)	Flow rate; (L/min)	Decrease amplitude of accuracy; (%)
300	15	14.4	4%	14.0	6.667%
600	15	13.9	7.333%	13.3	11.333%
900	15	13.6	9.333%	12.6	16%
1200	15	13.2	12%	11.9	20.667%