Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static-preview.hindawi.com/articles/mpe/volume-2019/8501583/figures/8501583.fig.007a.svgz" name="8501583.fig.007a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>Schematic diagram of modal experimental test</td></tr><tr class="fig-image" id="b"><td><object data="https://static-preview.hindawi.com/articles/mpe/volume-2019/8501583/figures/8501583.fig.007b.svgz" name="8501583.fig.007b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>Test specimen</td></tr></table>

<div>Modal experimental test setup.</div>

Mathematical Problems in Engineering

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Figure 7

Figure 7: Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage 