Research Article
Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage
Table 1
Compliance results with various out-of-plane compliance equations.
| | | (m/N) | (m/N) | (rad/Nm) | (1/N) | (rad/Nm) |
| | Mathematica | 9.26 × 1 | 6.01 × 1 | 8.78 × 1 | -2.63 × 1 | 1.90 × 1 | | Wu and Zhou | 9.26 × 1 | 5.17 × 1 | 8.78 × 1 | -2.63 × 1 | / | | Koseki | 9.98 × 1 | / | 7.92 × 1 | -2.38 × 1 | 3.77 × 1 | | Lobontiu | -7.67 × 1 | 4.30 × 1 | -9.59 × 1 | -1.28 × 1 | / | | Chen | / | / | / | / | 2.15 × 1 |
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