Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage

Table 2

The first two order modal frequencies results of the XY stage and a limb of the stage.

Order	Analytic		FEA		Test	Mode shapes
	/Hz	/%E	/Hz	/%E	/Hz
1st order of the XY stage	46.9	5.6	51	2.6	49.7	Translation of motion plate 1 along the y-axis
2st order of the XY stage	55.6	6.1	58.6	11.8	52.4	Translation of motion plate 1 along the x-axis
1st order of a limb of the stage	43.0	10.2	44.7	6.7	47.9	Bending about the leaf springs
2st order of a limb of the stage	123.7	9.5	128.2	6.2	136.7	Out-of-plane rotation about the leaf springs