Dynamic Analysis of a 5-DOF Flexure-Based Nanopositioning Stage

Table 3

Modal results of the dynamic model of the 5-DOF nanopositioning stage.

Order	Analytic		FEA		Test	Mode shapes
	/Hz	/%E	/Hz	/%E	/Hz
1	71.1	5.8	72.2	7.4	67.2	Translation of the base along the z-axis
2	78.4	6.4	75.9	3.0	73.7	Rotation of the base about the x-axis
3	79.0	7.2	76.2	3.4	73.7	Rotation of the base about the y-axis
4	106.9	15.3	98.3	6.0	92.7	Translation of plate 2 along the y-axis
5	116.1	12.7	104.6	1.6	103	Translation of the base along the x-axis
6	169.8	18.1	144.1	0.2	143.8	Rotation of the XY stage about the z-axis
7	184.2	20.3	161.3	5.4	153.1	Translation of plate 3 along the y-axis
8	202.8	19.4	176.1	3.7	169.8	Translation of motion plate 1 along the x-axis