Electromechanical Model of Coupling Spring Piezoelectric Oscillator with Loading

Table 1

Material parameters and structural dimensions of piezoelectric oscillators.

Parameters	Substrate	Piezoelectric thin film
Lx(cm)	14.5	10.0
	3.9	3.9
	1.03	0.50
	113	2.5
	8800	1760
	—	11
Relative permittivity	—	9.5